METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19900297517-传众专利搜索

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发明名称	METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH04170052(A)	申请公布日期	1992.06.17
申请号	JP19900297517	申请日期	1990.11.02
申请人	NEC YAMAGATA LTD	发明人	WATANABE TOKUJIRO
分类号	H01L23/522;H01L21/768	主分类号	H01L23/522
代理机构		代理人
主权项
地址

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