| 发明名称 |
METHOD AND DEVICE FOR TESTING AND REPAIRING AN INTEGRATED CIRCUIT |
| 摘要 |
In this device, the ion beam used for the repair forms at the same time the particle beam used for the test process and a single beam generating device is provided for generating this beam. Testing and repairing in one arrangement without requiring a change in the position of the integrated circuit to be examined reduces the time and cost expenditure |
| 申请公布号 |
EP0472938(A3) |
申请公布日期 |
1992.06.17 |
| 申请号 |
EP19910112862 |
申请日期 |
1991.07.31 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
TOKUNAGA, YASUO, DR. RER. NAT.;FROSIEN, JUERGEN, DR.-ING. |
| 分类号 |
G01R31/26;G01Q70/00;G01R31/302;H01L21/66;H01L21/82;H01L23/525;(IPC1-7):G01R31/302 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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