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发明名称
WAFER SCRUBBER
摘要
申请公布号
JPH04170028(A)
申请公布日期
1992.06.17
申请号
JP19900297521
申请日期
1990.11.02
申请人
NEC YAMAGATA LTD
发明人
SHIRAHATA KAZUHIRO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
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