METHOD OF AND APPARATUS FOR PRODUCING SUPERPURE NITROGEN

摘要

The present invention consists in that a nitrogen gas line and a liquid nitrogen line are subjected to hot-blast baking with clean nitrogen gas and a gas containing oxygen, whereby outgasses such as moisture to develop from heat exchangers, valves and piping can be excluded. Moreover, in order to obtain nitrogen gas of very high purity, liquid nitrogen of low contents of high-boiling components as subjected to rectifying separation is derived and gasified, and the liquid nitrogen is introduced into co-adsorbers so as to absorb and remove carbon monoxide difficult of separation by the rectifying separation, whereupon the liquid nitrogen and the nitrogen gas are obtained as products.