Method of and apparatus for analyzing granular materials

摘要

A method of and an apparatus for analyzing a granular material contained in a sample of a medium such as water produced by an ultra-pure water producing apparatus includes the steps of adding energy to granular materials contained in a sample which is mixed with the medium, wherein the energy is set to be lower than the breakdown threshold of the medium and to be higher than the breakdown threshold of the granular materials, detecting ions which are generated with the breakdown of the granular materials by using a pair of positive and negative electrodes; and analyzing characteristics of the granular materials based on the ions.