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发明名称
INSPECTION APPARATUS
摘要
申请公布号
JPH04167444(A)
申请公布日期
1992.06.15
申请号
JP19900294689
申请日期
1990.10.30
申请人
SHARP CORP
发明人
YASHIKI KAZUMI
分类号
G01R31/26;B07C5/36;G01R31/00;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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