摘要 |
PURPOSE:To improve analysis accuracy by providing a control gate signal path from a control part which controls the operation of each part to a data fetch command circuit and controlling the fetch of data to a data processing part according to the state of each part such as a supply means for a sample, etc. CONSTITUTION:The control part 31 outputs a control gate signal SA to the control gate signal path 32 according to the operation or state of the supply means 9, etc., and the discrimination result of the data processing part 8 which discriminates whether a detection data level is within the range between an upper- limit and a lower-limit value. Then, when the control gate signal SA and a particle arrival signal SB are both obtained, namely, when a particle arrival discrimination circuit 33 discriminates that the state or operation of the supply means 9 is at a period suitable for data fetch and within a proper range and that detection data show fine particles, the data fetch command circuit 35 outputs a data fetch command signal SD to the processing part 8, which analyzes fine particles on the basis of the detection data. |