发明名称 BUBBLER CYLINDER DEVICE
摘要 A cylinder assembly which may incorporate a dip tube when used, for example, as vapor transfer device of electronic grade organometallic liquids to a deposition system but can also be used for storing and dispensing liquids and gases. In case of vapor transfer, the device preferably includes one self-closable filling port (64) inlet, one gas inlet valve (14) and one outlet vapor valve (16). The dip tube extends downwardly into a cylindrical container.
申请公布号 SG44992(G) 申请公布日期 1992.06.12
申请号 SG19920000449 申请日期 1992.04.24
申请人 发明人
分类号 C23C16/44;C23C16/448;C30B25/02;C30B25/14;C30B31/16;F17C13/00;F17C13/04;H01L21/205;(IPC1-7):C30B31/16;F17C3/04 主分类号 C23C16/44
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