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发明名称
摘要
申请公布号
JPH0435404(B2)
申请公布日期
1992.06.11
申请号
JP19830212061
申请日期
1983.11.10
申请人
SHINGIJUTSU JIGYODAN;OOTSUKA KAGAKU KK
发明人
MASUMOTO TAKESHI;SUZUKI KENJI;MASUDA SHUJI;OOTA YUKIHIRO;OOKUBO MIKA
分类号
G01J1/02;C01G35/00;G01N27/12;G02F1/01;G02F1/03;G02F1/05;H01L41/18
主分类号
G01J1/02
代理机构
代理人
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