Gas separator for sepg. gases from gas mixt. selectively - has 1st wall section of partition of piezoelectric crystal with electrodes and 2nd wall section forms adjustable gap

摘要

In a gas separator having a gas-tight housing connected to a vacuum pump, the housing (1) is partitioned (4) into first and second chambers (2,3), the first chamber (2) having a gas inlet opening (5) and the second chamber (3) being connected to the vacuum pump. A first wall section (7) of the partition (4) consists of a piezoelectric crystal equipped with electrodes (9,10) and forms, with a second wall portion (8) of the partition (4), a gap (15) whose width is adjustable by voltage application to the electodes. ADVANTAGE - The separator separates gases from gas mixts. with adjustable selectivity and does not require regeneration.