发明名称 METHOD OF AND DEVICE FOR REMOVING RESIST
摘要 <p>A method of and a device for removing resist, which are capable of significantly promoting resist removing action effected by resist removing liquid and of improving uniformity in resist removing action by resist removing liquid to an exceedingly high level by spouting a mixture of resist removing liquid and gas or by alternately spouting resist removing liquid and gas onto said resist.</p>
申请公布号 WO1992009935(P1) 申请公布日期 1992.06.11
申请号 JP1991001635 申请日期 1991.11.28
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址
您可能感兴趣的专利