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发明名称
VERFAHREN UND VORRICHTUNG ZUM ANHEFTEN EINES STREIFENS ODER FILMS AN EINE HALBLEITERSCHEIBE.
摘要
申请公布号
DE3685136(D1)
申请公布日期
1992.06.11
申请号
DE19863685136
申请日期
1986.02.25
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
NAKAO, KUNIMICHI, MIDORI-KU YOKOHAMA-SHI KANAGAWA 227, JP
分类号
H01L21/30;C09J5/00;H01L21/00;H01L21/301;H01L21/302;H01L21/67;H01L21/683;H05K13/00;(IPC1-7):H01L21/00
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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