Increasing quality detection X=ray photoelectron spectroscope - directing X=rays at surface of investigation object at total reflection angle to eliminate background effects

摘要

The surface of the object under investigation is exposed to primary x-ray radiation and the spectra of the resulting photoelectrons and Auger electrons are analysed. The x-rays are directed at the surface at an angle selected to cause total reflection at the surface and a penetration depth of the x-rays of up to 10 nm. In particular the penetration depth is 2 nm. USE/ADVANTAGE - Enables elimination of background radiation level continuum w.r.t. electron spectrum and line expansion and for improvement in detection sensitivity.