| 摘要 |
PURPOSE:To improve resolution of exposure so as to simplify replacement of a mask by connecting pressure control means for controlling pressure of a gap part to a pattern part or a gap setting member. CONSTITUTION:A glass plate 6 and a spacer 7 constituting a gap setting member are arranged with a gap 9 above the exposed subject part of a mask pattern part 4 on the side not facing a member 8 to be exposed of the mask pattern 4. The bending amount of central part of mask pattern part 4 is reduced as much as possible by a pressure control part 10, and the distance between the mask pattern part 4 and the exposed member 8 is shortened. In replacing a mask 55, tubes 22, 15, 32 are dismounted in connection parts 70, 71, 72. It is thus possible to remove bending to thereby form an even pattern with an excellent resolution and to enable simple replacement of mask. |
