PROCESS AND APPARATUS FOR HEAT TREATMENT OF DISC-SHAPED SEMICONDUCTOR BODIES,申请号USD3526205-传众专利搜索

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发明名称	PROCESS AND APPARATUS FOR HEAT TREATMENT OF DISC-SHAPED SEMICONDUCTOR BODIES
摘要
申请公布号	US3526205(A)	申请公布日期	1970.09.01
申请号	USD3526205	申请日期	1966.10.19
申请人	SIEMENS AG.	发明人	RENE ROSENHEINRICH
分类号	C30B31/14;C30B35/00;H01L21/00;(IPC1-7):C23C11/00	主分类号	C30B31/14
代理机构		代理人
主权项
地址

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