发明名称 Method for detecting a reference position and displacement detector using the same.
摘要 <p>Disclosed is a displacement detector including light generation source for generating a light, a scale to be irradiated by the generated light and displaceable relative to the irradiated light, first detection device having a photo-sensing element for detecting a light transmitted through the scale for detecting displacement information of the scale, a mark having a focusing function formed integrally with the scale, and second detection device having a photo-sensing element for sensing the light focused by the mark for detecting a reference position of the scale. &lt;IMAGE&gt;</p>
申请公布号 EP0489399(A2) 申请公布日期 1992.06.10
申请号 EP19910120760 申请日期 1991.12.03
申请人 CANON KABUSHIKI KAISHA 发明人 IGAKI, MASAHIKO
分类号 G01D5/38;G01D5/36;G01J1/02;G02B3/08 主分类号 G01D5/38
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