MICROWAVE PLASMA CVD DEVICE HAVING IMPROVED MICROWAVE INTRODUCING MEANS,申请号JP19900289647-传众专利搜索

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发明名称	MICROWAVE PLASMA CVD DEVICE HAVING IMPROVED MICROWAVE INTRODUCING MEANS
摘要
申请公布号	JPH04165077(A)	申请公布日期	1992.06.10
申请号	JP19900289647	申请日期	1990.10.26
申请人	CANON INC	发明人	OTOSHI HIROKAZU;TAKEI TETSUYA;OKAMURA TATSUJI
分类号	C23C16/50;C23C16/511	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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