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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH04164320(A)
申请公布日期
1992.06.10
申请号
JP19900291586
申请日期
1990.10.29
申请人
NEC CORP
发明人
ISHIHARA YOSHITAKE
分类号
C23C14/34;H01L21/28;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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