| 摘要 |
<p>A confocal laser scanning differential interference contrast microscope comprises a laser source (1), an illuminating optical system (9) for condensing a light beam from the laser source (1) and forming a light spot on an object to be examined (5), a condensing optical system (4) for condensing the light beam from the object to be examined on a detecting surface, a detecting device for detecting the light beam condensed on the detecting surface, the detecting device having a substrate (6) formed with a channel waveguide and two light detecting elements (11),(12), the channel waveguide having a double mode channel waveguide (7) having an entrance end surface on the detecting surface and a waveguide fork which forks the double mode channel waveguide into two channel waveguides (9,10), the two detecting elements detecting lights propagated through the forked two channel waveguides, a scanning device (3) for moving the object to be examined and the light spot relative to each other, and a signal processing device (13) for producing the differential information of the object to be examined by the detection signals of the detecting elements. <IMAGE></p> |
