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发明名称
TWO-LUMINOUS FLUX INTERFERENCE EXPOSING DEVICE
摘要
申请公布号
JPH04163461(A)
申请公布日期
1992.06.09
申请号
JP19900290233
申请日期
1990.10.26
申请人
OLYMPUS OPTICAL CO LTD
发明人
KAMIJO HARUO;TEZUKA YOSHIKO;MACHIDA HIROYUKI
分类号
G02B5/18;G03F7/20
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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