PHOTO RESIST COATER,申请号JP19900289028-传众专利搜索

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发明名称	PHOTO RESIST COATER
摘要
申请公布号	JPH04163460(A)	申请公布日期	1992.06.09
申请号	JP19900289028	申请日期	1990.10.26
申请人	NEC YAMAGATA LTD	发明人	YAMAMOTO TSUTOMU
分类号	G03F7/16;B05C11/08;H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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