发明名称 |
PLATEN ASSEMBLY FOR A VACUUM PROCESSING SYSTEM |
摘要 |
A platen assembly (66) for holding a semiconductor wafer (30) for vacuum processing. The platen is a substantially solid, circular plate (194) which is surrounded by a movable clamp assembly (192) in the form of a ring having formed thereon a first set of projections (257, 258) for initially receiving a wafer above the plate, and a second set of projections (256) spaced axially from the first set for clamping the wafer to the plate. The ring is formed of two parts (251, 252) spaced apart axially and connected by spring members (254). A slot (255) is formed in the ring to permit the entry of wafers between the sets of projections. The clamp assembly is moved between a water receiving position and a clamping position by an annular fluid cylinder (228) and piston (232) assembly. The fluid cylinder and piston assembly includes bellows seals acting between the cylinder and piston rods (238) to maintain the vacuum integrity of the system. |
申请公布号 |
CA1303254(C) |
申请公布日期 |
1992.06.09 |
申请号 |
CA19890614869 |
申请日期 |
1989.09.29 |
申请人 |
EATON CORPORATION |
发明人 |
BRAMHALL, ROBERT B., JR.;CLOUTIER, RICHARD M. |
分类号 |
C23C14/50;C23C14/56;H01L21/203;H01L21/687 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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