| 摘要 |
PURPOSE:To secure such a metal mask that has a specified size opening and a specified thick distribution in a highly accurate manner by repeatedly performing a job for singular plating operations attending on a resin coat. CONSTITUTION:Since one time plating operation at a fourth process and one time or necessary times of repeated plating operations at a sixth process are carried out, a necessary thick metal mask material layer 6 is laminatedly formed on a substrate 1 so accurately and, what is more, in a sufficient coupling structure, owing to a repetition of multiple plating operations. In addition, each metal mask material layer 6 being laminated has a highly accurate opening part 7 by means of development in pile of a pattern film 5 of a photosensitive resin layer 3 at first to third processes, and they are formed in a thick-increment state required at each layer at a fifth process, so that size and partial thickness of the opening part 7 of the metal mask material layer 6 can be set up freely. With this constitution, such a metal mask as different in partial thickness is thus manufacturable without any problem. |
