Method for reflection-type two-dimensional pattern-reducing-copying using single convergence mirror and equipment thereof

摘要

The invention relates to a method and a device for reflection-type pattern copying, characterized by letting beams of light be incident on a pattern reflection plate on which a pattern to be copied is drawn, converging a pattern figure contained in the light reflected by the pattern reflection plate by means of a concave mirror and copying a two-dimensionally reduced pattern of the above pattern onto a surface of a specimen. Unlike conventional methods, the invention achieves two-dimensional reduced pattern copying by using one concave convergence mirror. A region of copying in which the blur size is not larger than a certain sufficiently small value can be expanded by parallelly arrnaging many concave convergence mirrors having the same shape and combining mechanical sweeping of the pattern reflection plate and the specimen.