| 摘要 |
PURPOSE:To eliminate a vibration noise by providing an electrode near a semiconductor detection element, detecting a vibration amplitude according to a change in capacitance formed with the aforesaid electrode and an external cylinder, and subtracting the amplitude from a measured signal. CONSTITUTION:A signal from a semiconductor detection element 1 after initially amplified with FET 3 is further amplified by an amplifier 8 for detecting an X-ray outside an external cylinder 7, and inputted to a subtraction circuit 12. Also, the vibration of the element 1 is detected, according to a change in capacitance formed with an electrode 4 and the cylinder 7, and the detected vibration signal is initially amplified with FET fixed to a holder 2 opposite to the electrode 4. The aforesaid signal is further amplified by another amplifier 9 for vibration detection. In this case, the degree of amplification is adjusted by an amplification adjustment dial 10. Output from the amplifier 9 is adjusted in frequency characteristics and phase through a filter circuit 11 before inputted to a circuit 12, and then outputted after subtraction from the signal of the amplifier 8. According to the afore-said construction, a vibration noise mixed into a semiconductor detector can be effectively eliminated, and a detector having high resolution can be constituted.
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