SAMPLE FOR CORRECTION OF DUST DETECTOR,申请号JP19900289706-传众专利搜索

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发明名称	SAMPLE FOR CORRECTION OF DUST DETECTOR
摘要
申请公布号	JPH04162548(A)	申请公布日期	1992.06.08
申请号	JP19900289706	申请日期	1990.10.25
申请人	NEC CORP	发明人	USAMI TATSUYA
分类号	H01L21/66;H01L21/22	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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