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发明名称
MANUFACTRUE OF COMPOUND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04162636(A)
申请公布日期
1992.06.08
申请号
JP19900290066
申请日期
1990.10.25
申请人
NEC KANSAI LTD
发明人
ISHIUCHI HIROAKI
分类号
H01L21/28;H01L21/3205;H01L21/338;H01L29/812
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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