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经营范围
发明名称
OPTICAL PUMPING PROCESS APPARATUS
摘要
申请公布号
JPH04162516(A)
申请公布日期
1992.06.08
申请号
JP19900287764
申请日期
1990.10.25
申请人
FUJITSU LTD
发明人
SUGINO SHIGEYUKI;YANO HIROSHI
分类号
H01L21/302;H01L21/205;H01L21/26
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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