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发明名称
MANUFACTURE OF DIELECTRIC ISOLATION SUBSTRATE
摘要
申请公布号
JPH04162746(A)
申请公布日期
1992.06.08
申请号
JP19900289919
申请日期
1990.10.26
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
KATAOKA KAZUSHI
分类号
H01L21/762;H01L21/76
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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