MANUFACTURING APPARATUS OF SEMICONDUCTOR ELEMENTS

摘要

An apparatus for making a semiconductor device comprises a flexible mat (12), support shafts (11) for supporting the flexible mat (12) in a substantially horizontal position, a pressing plate (16) having a generally convex body (17) and supported for movement up and down, and a drive mechanism for driving one of the pressing plates (16) and a wafer (13) on said mat relative to the other of the pressing plate (16) and the wafer (13) so as to move up and down. The wafer (13) having the first and second surfaces opposite to each other with the chips formed on the first surface thereof is placed on the mat (12) with the chips confronting the flexible mat (12). The convex body (17) of the pressing plate (16) is pressed against the second surface of the wafer (13) to separate the chips on the wafer (13) individually.