| 摘要 |
<p>PURPOSE:To improve reliability, mass productivity, and low-voltage drivability by removing the binder from a green multilayered body, and decomposing resin paste, and sintering the body integrally, and then applying polarization to a piezoelectric active layer. CONSTITUTION:A green multilayered body is heated to the temperature at which resin decomposes at slow speed in atmosphere using a resin furnace, and it is held at the temperature for several hours so a to degrease it. In this degreasing process, the binder ingredients within the green sheet, the organic solvent ingredients within the electrode past, and others are removed, and at the same time, the resin paste 13 is decomposed, and the part where the resin paste has been present becomes a cavity. Next, this body is sintered, and the shape of this cavity is maintained in an analog system even after the next sintering process, thus a monolithic piezoelectric sintered body, which has a close slit part 6a and an open slit part 6b, is obtained. Hereby, massproductivity can be improved, and the cost reduced, and the adhesion between the unimorph type piezoelectric parts and the improvement of reliability can be improved.</p> |
