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发明名称
INSPECTING DEVICE FOR APPEARANCE OF WAFER
摘要
申请公布号
JPH04162737(A)
申请公布日期
1992.06.08
申请号
JP19900289026
申请日期
1990.10.26
申请人
NEC YAMAGATA LTD
发明人
IGARASHI KINICHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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