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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04162717(A)
申请公布日期
1992.06.08
申请号
JP19900289856
申请日期
1990.10.26
申请人
FUJI ELECTRIC CO LTD
发明人
WATANABE MASAHIDE
分类号
H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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