| 摘要 |
<p>PURPOSE:To make it possible to clarify the change in film quality and mechanism by receiving scattering light from a sample, analyzing Raman activator, receiving the light which is transmitted through the sample, and analyzing infrared-ray activator. CONSTITUTION:The light emitted from a light source 3 reaches a sample 1 through a light path 4 and a light path 5, respectively. The light through the light path 5 is scattered on the surface of the sample 1 and reaches a Raman spectroscope 8 through a lens 6 and an analyzer 7. The light through the light path 4 passes through the sample 1 and reaches an infared absorption spectroscope 11 by way of a mirror 9 and a slit 10. In the infrared absorption spectroscope 11, the relationship between the wavelength and the absorbance is obtained. In this way, the change in states of the infrared-ray activator and Raman activator when heating, cooling, gas discharging and the like are performed can be measured at the same time. Thus, the history of composition change and the like can be made clear.</p> |
