| 摘要 |
PURPOSE:To irradiate a target position with a carbonic acid gas laser beam accurately by furnishing a mixing filter as object of invention with a laser beam penetrative laminate film and a visible ray reflecting laminate film, and forming a substrate of GaAs. CONSTITUTION:A ThF4 layer 12 and a ZnSe layer 13 formed over a S1 surface 11a are to prevent reflection of a carbonic acid gas laser beam having a wavelength of 10.6mum and introduce the incident beam into a substrate with no reflection loss. Four layers formed on a S2 surface 11b have a characteristic of emitting carbonic acid gas laser beam having penetrated the substrate without reflection loss and also a property of reflecting a He-Ne laser beam having a wavelength of 0.633mum with high efficiency. The carbonic acid gas laser beam penetrates a mixing filter 10 with no loss substantially while He-Ne laser beam is reflected with a high reflection coefficient. The He-Ne laser beam not reflected and intruded into the base board is absorbed in the substrate 11 which is made of GaAs. |
