| 摘要 |
PURPOSE:To prevent collision of a probe with a sample even when encountering sharp irregularities of the sample by widening a distance between the probe and the sample irrelevant to a Z-wise servo control means when a detection value of a two-dimensional displacement of the probe exceeds a specified value in an atomic microscope or the like. CONSTITUTION:The surface of a sample 34 undergoes a two-dimensional scanning with a probe 14 mounted on a cantilever 12. A laser light from a laser 24 is reflected with a mirror 16 or the like of the lever 12 to be received with a photo detector 32 and a Z axis-wise displacement of the probe 14 is detected to control a supply current to a piezo-electric element of a piezo-electric actuator 36 of a Z-wise servo control means so that a displacement between the sample 34 and the probe 14 becomes constant in value to measure irregularities of the sample surface from the resulting current value. When DELTAX1 of a two-dimensional displacement value detection value of the probe in scanning exceeds a specified value, the probe 24 has a distance DELTAZ widened between the probe 24 and the sample 34 irrelevant to the Z-wise servo means. This control allows avoidance and prevention of collision of the probe with the sample even when encountering sharp irregularities of the sample. |
