Sputtering equipment for coating large substrates with ferromagnetic and non-magnetic material - has cathode target comprising sub-targets, and cooling plates contg. magnet unit and poles shoes

摘要

Sputtering equipment for coating large substrates with ferromagnetic and non-ferromagnetic material has a cathode target (1), consisting of at least two sub targets (1',1''), electrically isolated from each other and supplied with any desired voltages. A cooling plate (2) is constructed like the target from at least two sub-cooling plates (2',2''). The cooling plate contains magnet units (5) with pole shoes (4) such that the gap between sub targets and sub cooling plates is in the region of a pole. The distance between a sub target and the associated magnet unit can be independently varied by relative mechanical movement. ADVANTAGE - At least two materials can be simultaneously or successively deposited on a substrate.