发明名称 HERSTELLUNG METALLISCHER STRUKTUREN AUF ANORGANISCHEN NICHTLEITERN.
摘要 Metallic structures are produced on inorganic non-conductive surfaces by (a) producing the desired structures on the surface with the aid of masks, lacquers or other coverings; (b) exposing to the action of reactive halogen-contg. gases in a glow discharge zone; (c) removing the cover; (d) metallising by conventional physical methods; and (e) immersing in water or aq. solns. of complex formers, acids, alkalis or materials which dissolve the metal halide cpd. produced.
申请公布号 DE3685050(D1) 申请公布日期 1992.06.04
申请号 DE19863685050 申请日期 1986.03.22
申请人 SCHERING AG BERLIN UND BERGKAMEN, 1000 BERLIN, DE 发明人 SUHR, PROF. DR. RER. NAT., HARALD;FEURER, ERNST, W-7400 TUEBINGEN, DE;OEHR, CHRISTIAN, W-7403 REUSTEN, DE
分类号 C04B41/51;C23C14/04;C23C16/04;H01L21/48;(IPC1-7):C04B41/51 主分类号 C04B41/51
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