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经营范围
发明名称
ION BEAM DEVICE
摘要
申请公布号
JPH04160747(A)
申请公布日期
1992.06.04
申请号
JP19900284081
申请日期
1990.10.22
申请人
HITACHI LTD
发明人
DAINO TOSHIYUKI;OISHI SEITARO;HASHIMOTO ISAO
分类号
G21K1/14;C23C14/22;G03F7/20;H01J37/317
主分类号
G21K1/14
代理机构
代理人
主权项
地址
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