发明名称 Diamond layer heat sink for electronic applications - has smooth thermal contact surface
摘要 <p>A heat sink for use with electronic circuits is formed from a synthetic diamond layer, having a smooth surface for good thermal contact, backed by an optional bonding layer and a metal with good thermal transport properties. The surface of a substrate (1), e.g. a Si disc 3 mm thick, is well polished for good contact and finely scratched to provide growth points. The substrate is then coated with a synthetic diamond layer (2) approx. 65 micon thick by CVD techniques. A metallic bonding layer (3) consisting of e.g. a multi-layer of Ti-Pt-Au may be applied to the diamond layer. This is then backed by a suitable metal coating (4) with good thermal properties, e.g. Cu, applied by electro-plating techniques, with thickness dependent on the required properties of the heat sink.</p>
申请公布号 NL9002430(A) 申请公布日期 1992.06.01
申请号 NL19900002430 申请日期 1990.11.08
申请人 DRUKKER INTERNATIONAL B.V. TE AMSTERDAM. 发明人
分类号 C23C16/01;C23C16/26;C23C16/27;H01L21/48;H01L23/373 主分类号 C23C16/01
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