Pellicle Structure and Process for Preparation Thereof

摘要

Discussed is a pellicle structure comprising a frame having a through opening, a pellicle film spread around the opening of the frame, the pellicle film having a coating layer formed at least on the inner surface thereof, and a bonding portion for bonding the frame to the periphery of the pellicle film through an adhesive layer, wherein there is no coating layer in the bonding portion (the coating having dissolved or dispersed in the adhesive) and the pellicle film is directly bonded to the frame by the adhesive. This pellicle structure is prepared by coating an adhesive, capable of dissolving the coating layer of the pellicle film around the opening of the frame, contacting the adhesive-coated surface of the frame with the surface of the coating layer of the pellicle film so as to dissolve and remove the coating layer in the bonding portion and curing the adhesive so that the pellicle film is directly bonded to the frame.