DRY ETCHING APPARATUS,申请号KR19850004887-传众专利搜索

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发明名称	DRY ETCHING APPARATUS
摘要
申请公布号	KR920004171(B1)	申请公布日期	1992.05.30
申请号	KR19850004887	申请日期	1985.07.09
申请人	HITACHI, LTD.	发明人	TSUJII, KANJI;YAJIMA, YUSKE;MURAYAMA, SEIICH
分类号	H01J37/32;H01L21/3065;(IPC1-7):H01L21/145;H01L21/302	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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