| 摘要 |
<p>PURPOSE:To effectively use a space by moving each wafer toward any of a cassette conveying/delivering unit, a wafer aligner, a wafer inverter and a wafer holder, and providing a plurality of wafer conveying arms at its ends. CONSTITUTION:A wafer conveyed by a wafer conveying arm is grasped by a wafer grasping roller of a moving unit 22 in a state placed on a wafer placing base 21 in a wafer aligner 20, detected by an orientation flat detecting sensor 24, and a first drive motor is finely rotated based on a position from the sensor 24 to accurately align an orientation flat part and to align the center of the wafer. A wafer inverter 30 mainly has an inverter 32 having a pair of telescopically movable wafer grasping units 31, elevation means 33 for vertically moving the inverter 32, inverting means 34 for reversely or normally rotating the inverter 32, and grasping unit moving means 35 for simultaneously moving to telescope the units 31.</p> |
