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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04157732(A)
申请公布日期
1992.05.29
申请号
JP19900283169
申请日期
1990.10.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
SUMIYA KOICHI
分类号
H01L29/812;H01L21/28;H01L21/338
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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