CLEAN TRANSPORT METHOD AND DEVICE

摘要

PURPOSE:To allow only a simple clean room to be used whose cleanliness is not so satisfactory by shifting an object to be transported in a state where a transport port of a vacuum clean box under a degree of vacuum of 1 Toor or less and that of a vacuum chamber are connected mutually and airtightly. CONSTITUTION:Degree of vacuum within a vacuum clean box 15 is set to a clean state of 1 Torr or less. A shutter 21 is airtightly engaged to a transport part 20 with a flange of each device 11 which is equipped with a vacuum chamber 13 and similarly a shutter 23 is airtightly engaged to a transport port 22 of the vacuum clean box 15. Namely an O ring 32 for airtightly sealing a space with the transport port 20 is provided at the shutter 21 and similarly an O ring 23 for airtightly sealing a space with the transport port 22 is provided at the shutter 23. Also, an O ring 25 is placed at a butt surface (flange surface) of the transport port 20 at a device side and a lock member 26 for locking the shutter 21 is provided at a rear part of the flange of the transport port 20. Permanent magnets 30 and 31 are buried and fixed at shutters 21 and 23.