| 摘要 |
The micro-pump uses a piezo-electric pad (13) to produce deformation of a plate (12), causing variation of volume in a chamber (15) formed inside a plate (11). The plate is of a material which can be photolithographically machined. The pump outlet (3) is closed, selectively, by a membrane check-valve (18). The outlet membrane has a layer of oxide (17) that provides a pretension on closing, so the check-valve has a regulatory effect on pump operation, making flow almost independent of outlet (3) pressure.
|
