| 摘要 |
PURPOSE:To discharge-excite laser gas without using a switching element by setting a predetermined interval of intervals between electrodes to be periodically varied to an interval for discharge-exciting the gas to be circulated in a discharge region, and alternately opening and closing a suction reed valve and a discharge reed valve. CONSTITUTION:A pair of electrodes 2, 3 are disposed oppositely in a discharging housing 13, and a discharging region 5 is formed between the electrodes 2 and 3. If laser gas 7 is circulated in the region 5, a movable base 11 (anode 3) reaches a predetermined position, a main discharge is generated between the anode 3 and the cathode 2, and the gas 7 is excited. Since a suction reed valve 23 and a discharge reed valve 24 are alternately opened and closed in response to a periodical change of the interval between the electrodes 2 and 3, the gas 7 in the housing 13 is circulated, and a circulating fan is eliminated. |
