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发明名称
MANUFACTURE OF SPACE LIGHT MODULATOR
摘要
申请公布号
JPH04157425(A)
申请公布日期
1992.05.29
申请号
JP19900283778
申请日期
1990.10.22
申请人
SEIKO INSTR INC
发明人
KATO NAOKI;YAMAMOTO SHUHEI;EBIHARA TERUO;SEKURA RIEKO
分类号
G02F1/1339;G02F1/1337
主分类号
G02F1/1339
代理机构
代理人
主权项
地址
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