| 摘要 |
<p>PURPOSE:To obtain hyperpure gaseous nitrogen by using metallic members into a path of the gas formed in the main body of the purifier for adsorbing gaseous impurities in the revelant gas to eliminate gaseous impurities. CONSTITUTION:Gaseous nitrogen is sent into metal supporting body 39 of the main body of this purifier through gas supplying pipe 35a, during passage of this stage, contact with metallic member 2 in the metal supporting body 39 and gaseous impurities are adsorbed and removed by the metallic member 2, and the purified gaseous nitrogen is taken-out from a gas take-out pipe 35c. By this means, the characteristics of the metal member which effectively absorb gaseous impurities are applied and also the characteristics of the metallic member having high resistivity against repeated thermal cycles between low temp. and high temp. are applied as well without causing pulverization of the metallic member and able to reliably eliminate minor impurities in nitrogen product and obtain hyperpure gaseous nitrogen.</p> |
