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经营范围
发明名称
SILICA LIQUID APPLYING DEVICE
摘要
申请公布号
JPH04156973(A)
申请公布日期
1992.05.29
申请号
JP19900278260
申请日期
1990.10.17
申请人
NEC CORP
发明人
IWAMI SATOSHI
分类号
B05C11/08;B05C11/10;H01L21/027;H01L21/30;H01L21/316
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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